Practical Comparisons Between RF-GD-OES and GDMS
نویسندگان
چکیده
While GDMS is the technique of choice for high sensitivity metals and semiconductor analyses, there are no commercially available radio frequency-GDMS sources. Thus, bulk non-conductive materials must be ground to a powder, mixed with metal, and pressed to form a conductive disk. The analysis of thick oxide or polymer layers is not available directly. In some cases, a conductive metal mask (called the secondary cathode) is placed over/around the sample, but this
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